线性纳米定位器SLC-24系列是高精度纳米线性定位器,具有SLC-2430,SLC-2445,SLC-2460,SLC-2475,SLC-2490,SLC-24105,SLC-24120,SLC-24150,SLC-24180型号各种宽度和高度,feichang适合微纳定位系统使用,具有可靠的稳定性和极高的定位精度。这些线性定位器还具有非磁性材料类型,能够兼容10^-11mbar真空环境。
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线性纳米定位器SLC-24系列具有紧凑的结构和微小的外形尺寸,可以植入位置传感器从而**地胜任微纳定位任务.
线性纳米定位器SLC-24系列产品都能达到
blocking force FB > 3.5 N, ***大力FN~30 N,***大Lift force FL>11.5N,速度达到20mm/s。
线性纳米定位器SLC-24系列规格参数
| 型号 |
SLC-2430 |
SLC-2445 |
SLC-2460 |
SLC-2475 |
SLC-2490 |
SLC-24105 |
SLC-24120 |
SLC-24150 |
SLC-24180 |
| 分辨率 |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
| 负载 |
20N(2kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
30N(3kg) |
| 适合真空度 |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
10-11 mbar |
| 行程范围 |
16mm
（±6mm) |
29mm
（±14.5mm) |
35mm
（±17.5mm) |
49mm
（± 24.5mm) |
63mm
（± 31.5mm) |
69mm
（± 34.5mm) |
83mm
（± 41.5mm) |
± 51.5 (103) mm |
± 61.5 (123) mm |
| 步进1 |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
1-1500nm |
| 扫描范围 |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
>1.5um |
| 扫描分辨率 |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
<1nm |
| 速度 |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
>20mm/s |
| ***大频率 |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
18.5KHz |
| 阻尼力Fb |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
>3.5N |
| ***大正向力Fn |
20N |
30N |
30N |
30N |
30N |
30N |
30N |
30N |
30N |
| ***大升力Fl |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
>1.5N |
| 尺寸 |
30x24x10.5
mm^3 |
45x24x10.5
mm^3 |
60x24x10.5
mm^3 |
75x24x10.5
mm^3 |
90x24x10.5
mm3 |
105x24x10.5x
mm3 |
120x24x10.5
mm^3 |
150x24x10.5
mm^3 |
180x24x10.5
mm^3 |
| 重量 |
36g |
54g |
72g |
90g |
108g |
126g |
144g |
180g |
216g |
| pitch俯仰力矩Mp |
2.2Nm |
7.5Nm |
12.8Nm |
18.1Nm |
29.5Nm |
37.5 Nm |
49.1Nm |
49.1Nm |
49.1Nm |
| yaw偏航力矩My |
2.2Nm |
7.5Nm |
12.8Nm |
18.1Nm |
29.5Nm |
37.5 Nm |
49.1Nm |
49.1Nm |
49.1Nm |
| roll扭转力矩Mr |
1.5Nm |
2.6Nm |
3.2Nm |
3.9Nm |
4.8Nm |
5.8Nm |
6.1Nm |
6.1Nm |
6.1Nm |
Closed-Loop-S
传感器分辨率 |
1nm |
1nm |
1nm |
1nm |
1nm |
1nm |
1nm |
1nm |
1nm |
Closed-Loop-S
重复精度2 |
+/-30nm |
+/-45nm |
+/-60nm |
+/-75nm |
+/-90nm |
+/-105nm |
+/-120nm |
+/-150nm |
+/-180nm |
Closed-Loop-L
传感器分辨率 |
4nm |
4nm |
4nm |
4nm |
4nm |
4nm |
4nm |
4nm |
4nm |
Closed-Loop-L
闭环分辨率 |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
±500nm(H)CU
4nm MCS |
Closed-Loop-L
重复精度 |
±1um(H)CU
±60nm MCS |
±1um(H)CU
±90nm MCS |
±1um(H)CU
±120nm MCS |
±1um(H)CU
±150nm MCS |
±1um(H)CU
±180nm MCS |
±1um(H)CU
±210nm MCS |
±1um(H)CU
±240nm MCS |
±1um(H)CU
±300nm MCS |
±1um(H)CU
±360nm MCS |
