这款
万向旋转倾斜台是采用直驱电机制造的万向载物台和万向工作台,具有倾斜和旋转功能提供万向定位,广泛用作3D激光打印万向载物台和微纳制造万向工作台架。
万向旋转倾斜台采用3相无铁线性无刷伺服电机BLDC技术,为用户带来零反冲高精度万向倾斜旋转运动,具有独特精度高,重复精度高和摩擦低的特点。
万向旋转倾斜台采用线性非接触式光学编码器作为反馈系统,使得位置控制高达亚纳米级分辨率。
万向旋转倾斜台采用自然老化铝合金确保了万向节台高温稳定性和轻巧性,以及*良的长周期运动,导轨系统不会发生漂移。
万向旋转倾斜台可以用于洁净空间环境或真空度10^-3Torr的真空环境,也可根据用户要求提供高真空
万向倾斜旋转台。
万向旋转倾斜台可以轻松地直接连接到光学平台上,也可与
直驱线性平移台搭建成电动4轴定位平台系统,非常适合微纳制造。
万向旋转倾斜台还可以安装到花岗岩龙门架或高精度平台上实现高精度万向定位。
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万向旋转倾斜台规格参数
|
倾斜轴向 |
Tilt (A) Axis |
Yaw (B) Axis |
|
运动学和反馈系统规格参数 |
|
角度范围 |
±130度 |
±360度 (无限) |
|
编码器类型 |
光学编码器 |
|
编码器型号 |
LEN2 |
|
编码器分辨率 1) |
0.023~0.184arcsec |
|
编码器接口 |
差分RS422 或模拟SIN/COS |
|
内部放大倍数 |
YES (optionally analog SIN/COS) |
|
放大系数 |
4-200 (on demand) |
|
Encoder Grating Period |
20µm |
|
Reference Mark (Index) |
Yes |
|
Absolute Accuracy 2) |
|
Before Calibration |
±218 / ±45.00 µrad / arcsec |
|
After Calibration |
±14.54 / ±3.00 µrad / arcsec |
|
Uni-Directional Repeatability, µrad / arcsec |
N/A |
|
Bi-Directional Repeatability (peak to peak) 2) |
±7.30 / ±1.50 µrad / arcsec |
|
Bi-Directional Repeatability (RMS) 2) |
±2.90 / ±0.60 µrad / arcsec |
|
偏心率Eccentricity 3) |
±5.00 µm |
|
摆动Wobble 3) |
±19.40 / ±4.00 µrad / arcsec |
|
Maximum Velocity (no load, @300VDC) 4) |
<9000 / 1500 deg/s / RPM |
|
Maximum Acceleration (no load) 5) |
1080000 / 180 deg/s2 / kRPM/s2 |
|
Maximum torque (continuous)5) |
5.4Nm |
|
Limits Switches |
N/A |
|
Load, Guiding & Transmission Information |
|
Design Type |
Torque Motor (Direct-Drive)
Two-Axis Rotation (Gimbal) Stage |
|
Motor Model |
TM1 |
|
Motor Design Type |
Torque Motor |
|
Maximum Bus Voltage, VDC |
<320 |
|
Load Capacity (Centrally Placed) 6) |
|
Horizontal |
1kg |
|
Vertical |
1kg |
|
Moving Mass 7) |
6.6kg |
1.55kg |
|
Guiding System |
Crossed roller bearings |
|
Material & Environment Conditions |
|
Housing Material |
Aluminum Alloy |
|
Housing Coating (Finish) |
Black Anodizing |
|
Environment Pressure |
Normal Atmosphere |
|
Operating Temperature, °C |
20±2 |
|
Control, Communication and Cabling |
|
Recommended Controllers 8) |
ACS Products Line or 8SMC5-USB series |
|
Recommended Drivers 8) |
ACS Products Line or 8SMC5-USB series |
|
Recommended Power Supply 9) |
2 phase / 3 phase source |
|
Recommended Communication Interface 11) |
EtherCAT / RS232 / USB / TCP-IP |
|
Cable Length, m |
2 (other by request) |
|
Differential Outputs 10) |
On request |
|
Accessories Information |
|
Base Plate for Mechanical Interface |
Not required |
|
Additional Details |
|
Magnetic Brake |
Yes |
No |
|
Dimensions of Moving Platform |
Ø90mm |
|
Central Aperture |
N/A |
Ø15mm |
|
Overall Linear Stage Dimensions (W x L x H) |
149 x 349 x 161mm (entire system) |
|
Measurement System |
Metric / Imperial (Base) |
|
RoHS |
Compliant |
|
Weight, kg |
12.3kg (entire system) |
1) 默认为x4转PPR-脉冲数/每转，模拟SIN/COS编码器接口
2)绝对精度和双向重复定位精度采用Zygo ZMI 501 Michelson laser interferometer测量计算
3) Pitch & Yaw 采用
11D-ALI-COL 电子自相关仪器测试,电子自相关仪
11D-ALI-COL分辨率1µrad. 环境误差1µrad.
4) ***大速度由编码器限制和驱动器CUT-OF频率以及导向系统限制.
5)***大加速度由驱动器“Peak Current, Motors` Peak Current and External Load (inertia)决定.
6)负载能力由导向系统决定.
7) 运动质量是系统常数m
0,通常是没有负载时的惯性。
8) 推荐的控制器和驱动器有助于发挥电动平移台的性能.
9) 推荐的电源是根据用户的占空比和负载来选择.
10) 差分输出接口,可提供主动或被动LCMv2接口.
11) 标量控制可采用USB / TCP-IP / RS-232通讯接口,矢量控制建议采用EtherCAT接口。
